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HORIBA光纖型化學藥液濃度計CS-152F1每臺濃度計可實現多達四種藥液的測量

發布時間:2025/02/13 14:17:00 發布廠商:北崎國際貿易(北京)有限公司 >> 進入該公司展臺

CS-100F1 系列

HORIBA光纖型化學藥液濃度計CS-152F1每臺濃度計可實現多達四種藥液的測量

光纖型化學藥液濃度計

CS-100F1 系列在CS-100的基礎上配備光纖。樣品單元直接集成到于清洗系統的管路,并使用光纖電纜傳輸光信號,提供實時在線測量。每臺濃度計可實現多達四種藥液的測量,可以在單槽或單晶圓清洗系統中檢測多種化學藥液。

可測量化學藥液示例

事業部: 半導體
產品分類: 濕法過程控制
制造商: HORIBA Advanced Techno Co., Ltd.
Model CS-151F1 CS-152F1 CS-150F1
Target of
measurement
SC-1
(ammonia/hydrogen peroxide
aqueous solution)
SC-2
(hydrochloric acid/hydrogen
peroxide aqueous solution)
SPM
(sulfuric acid/hydrogen
peroxide aqueous solution)
Multi-monitoring with one unit of up to 4 types of chemical solutions or ranges possible.
Measurement principle Absorption spectrometry
Concentration computation
principle
Temperature-compensated multivariate analysis
Measurement range
(mass %)
NH3: 0.00% to 1.00%
H2O2: 0.00% to 5.00%
H2O: 94.0% to 100.0%
HCI: 0.00% to 2.00%
H2O2: 0.00% to 2.00%
H2O: 96.0% to 100.0%
H2SO4: 70.0% to 96.0%
H2O2: 0.00% to 10.00%
H2O: 4.0% to 30.0%
Repeatability (mass %)
(within ±1% room temperature)
NH3: ±0.15%
H2O2: ±0.30%
H2O: ±1.5%
HCI: ±0.15%
H2O2: ±0.15 %
H2O: ±1.5%
H2SO4: ±0.50%
H2O2: ±0.50%
H2O: ±1.5%
?Repeatability for the list above is for the cell unit type.Please contact us for the repeatability of the in-line cell type.
?Differences in the above list may occur depending on measurement range.(Please see our website for details.)
Sample solution temperature 20 to 80: (when using Inline cell) 20 to 30: (when using cell unit)
Measurement cycle Approx. 3 seconds
Content of
LCD and input
? 1st component: measured concentration value (%)   ?Error code
? 2nd component: measured concentration value (%)  ?Parallel concentration alarm output invalid status
? 3rd component: measured concentration value (%)  ?Serial/parallel status
? 1st and 2nd components: concentration alarm status ?Background compensation data
RS-232C serial input ? Serial/parallel status switching            ?Parallel concentration alarm output status
? Measurement data transfer request         (valid/invalid)
? 1st and 2nd component concentration alarm setting ??Target measurement solution switching
Parallel input 12 to 30 V DC (photocoupler insulated)        ? Parallel concentration alarm output
                          ? Target measurement solution switching
                          ? Background compensation
Parallel output Open collector output (photocoupler insulated)    ?? 1st component concentration alarm, 4 types
Max. current when on:               ? ? 2nd component concentration alarm, 4 types
  DC 5 mA (no internal protection resistor)        ? Device error
Max. impressed voltage when off: 30 V DC       ? Measuring
                           ? Target measurement solution type
                           ? Background compensation status
Solution temperature input Terminal block connection (M3 terminal screws)
? Platinum resistance temperature sensor: Pt100 (Pt100 sensor should be prepared by customers)
Analog output ? 1st component concentration alarm, 4 types: 4 to 20 mA
? 2nd component concentration alarm, 4 types: 4 to 20 mA
?We also support other measurement ranges. Please specify when ordering.
Fiber optic cable Dedicated CS-100F1 Series fiber optic cable (25 ±15: installation temperature)
Sample cell We can supply dedicated sample cells (inline cell or cell unit) for various kinds of chemical solutions.
Power supply 100 V to 230 V AC (single phase) ±10%, 50/60 Hz, approx. 100 VA
Dimensions 205 (W) x 329 (D) x 269 (H) mm 8.1 (W) x 13.0 (D) x 10.6 (H) in (excluding protruding part)
Weight Approx. 11 kg
scrollable

Note: Please consult us regarding concentration monitors for chemical solutions other than those given above.

Schematics

Concentration monitor

Inline cell                                                                                     Cell unit

              

  • 使用在線樣品單元實時跟進濃度信息
    使用直接連接清洗系統主管路的在線樣品單元實時檢測濃度。
  • 多達四種藥液的多重檢測
    每臺濃度計可測量多達四種化學藥液或濃度范圍。用戶可單次檢測多種化學藥液的濃度(或不同配比的化學藥液),如單槽或單晶圓清洗系統。
  • 更高精度的樣品單元類型
    為保證穩定性,還提供一種樣品單元類型,支持使用濃度計輸出信號反饋進行控制。該濃度計還支持將化學藥液濃度保持在可接受的范圍內,并消除不必要的化學藥液變化。
  • 電氣單元和測量單元完全分離,安全安裝
  • 符合 RoHS 標準

CS-152F1
光纖型化學藥液濃度計CS-100F1
HORIBA日本堀場
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